Course Highlights: CMPE 691

CMPE 691: MicroElectroMechanical Systems (MEMS)

Professor: Dr. Gymama Slaughter, Assistant Professor

Semester: Fall 2011          Time: MW 4:00-5:15             Credits: 3

This course exposes graduate students to the latest developments in MicroElectroMechanical Systems (MEMS). MEMS is a rapidly growing field that combines micron-scale mechanical structures with microelectronics circuits, which have many applications in sensing, actuation, and communication. A wide range of topics including: mechanical and electrical design, bulk and surface micromachining, MEMS design and layout, fabrication processes, and applications will be covered. Software available on the web will be used in all assignments. The course work will be used to develop potential graduate research topics and look at the feasibility of different aspects of MEMS.